Theory of improved resolution in depth profiling with sample rotation

Applied Physics Letters

Volumn 68, Issue 26, 1996, Pages 3722-3724

  Bradley, R Mark ^a   Cirlin, Eun Hee ^b  

^a Department of Environmental and Radiological Health Sciences   (United States)

^b Hughes Aircraft Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001070524     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115985     Document Type: Article

References (18)

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4. See also Refs. 1 2 3 4 5 6 7 cited in Ref. 1 and Refs. 1 2 3 4 5 6 7 8 in Ref. 2.
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9. E.-H. Cirlin, Thin Solid Films INS 220, 197 (1992).
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11. For a recent review, see Ref. 9.
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13. E.-H. Cirlin, J. J. Vajo, and T. C. Hasenberg, J. Vac. Sci. Technol. B AIP 12, 269 (1994).
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17. R. M. Bradley (unpublished).
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