The interaction of Al, Ag, Au, and Ti to Pr2O3 thin film dielectrics

Materials Science and Engineering C

Volumn 26, Issue 5-7, 2006, Pages 1127-1130

  Torche, M ^a   Henkel, K ^a   Schmeisser D ^a  

^a BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Metals diffusion; Photoelectron spectroscopy; Praseodymium oxide

Indexed keywords

DIFFUSION; ELECTRON BEAMS; EVAPORATION; THERMODYNAMIC STABILITY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

METAL CONTACTS; METALS DIFFUSION; PRASEODYMIUM OXIDE;

DIELECTRIC FILMS;

EID: 33747123688     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2005.09.077     Document Type: Article

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