Synthesis, characterization and nanostructuring of (a-C:H):Si and (a-C:H):Si:metal films

Diamond and Related Materials

Volumn 15, Issue 4-8, 2006, Pages 1147-1150

  Kirpilenko, G G ^a   Frolov, V D ^b   Zavedeev, E V ^b   Pimenov, S M ^b   Konov, V I ^b   Shelukhin, E Y ^a   Loubnin, E N ^c  

^a CSC Patinor Coatings Ltd   (Russian Federation)

^b PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^c Physical Institute   (Russian Federation)

Author keywords

Carbon silicon composites; Characterization; Metal doping; Scanning probe microscopy based nanolithography

Indexed keywords

COMPOSITION; DOPING (ADDITIVES); HYDROCARBONS; NANOSTRUCTURED MATERIALS; SILICON; SUBSTRATES; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION;

AUGER ELECTRON SPECTROSCOPY (AES); CARBON-SILICON COMPOSITES; METAL DOPING; SCANNING PROBE MICROSCOPY (SPM); SCANNING PROBE MICROSCOPY-BASED NANOLITHOGRAPHY;

METALLIC FILMS;

EID: 33747003232     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.10.026     Document Type: Article

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