Modified atomic force microscopy cantilever design to facilitate access of higher modes of oscillation

Review of Scientific Instruments

Volumn 77, Issue 7, 2006, Pages

  Sadewasser, S ^a,b   Villanueva, G ^a   Plaza, J A ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BANDWIDTH; COMPUTER SIMULATION; FINITE ELEMENT METHOD; LASER MODES; MICROMACHINING; NATURAL FREQUENCIES; OSCILLATIONS; PHOTODIODES; RESONANCE;

BEAM DEFLECTION DETECTION TECHNIQUE; CANTILEVER DESIGN; RESONANCE FREQUENCY; SILICON MICROMACHINING PROCESSES;

CANTILEVER BEAMS;

EID: 33746805776     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2219738     Document Type: Article

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