New generation of fully integrated optical microscopes on-chip: Application to confocal microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6186, Issue , 2006, Pages

  Bargiel, Sylwester ^a   Nieradko, Łukasz ^a   Józwik, Michał ^a   Gorecki, Christiophe ^a   Dziuban, Jan A ^b  

^a FEMTO ST INSTITUTE   (France)

^b WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Electrostatic actuation; Glass microlens VCSEL; MOEMS; Optical feedback; Scanning Confocal Microscope; Silicon micromachining

Indexed keywords

ELECTROSTATICS; LASER BEAMS; MICROLENSES; MICROMACHINING; OPTICAL MICROSCOPY;

ELECTROSTATIC ACTUATION; GLASS MICROLENS VCSEL; MOEMS; OPTICAL FEEDBACK; SCANNING CONFOCAL MICROSCOPE; SILICON MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 33746691967     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.663770     Document Type: Conference Paper

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