Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS

Journal of Microlithography, Microfabrication and Microsystems

Volumn 4, Issue 4, 2005, Pages

  Gorecki, Christophe ^a,b   Józwik, Michał ^a,b   Sałbut, Leszek ^a,c  

^a SPIE ^*  (France)

^b UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^c WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Interferometry; Mems actuators; MOEMS; Out of plane displacements; PECVD deposition; Residual stress; Stroboscopy; Vibration modes

Indexed keywords

MEMS ACTUATORS; OUT-OF-PLANE DISPLACEMENTS; STROBOSCOPY; VIBRATION MODES;

ELECTRONIC EQUIPMENT TESTING; INTERFEROMETRY; MICROACTUATORS; MICROPROCESSOR CHIPS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESIDUAL STRESSES; SILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 33746722355     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2110027     Document Type: Article

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