Strength evaluation for notching damage of MEMS micromirror by dual-direction bending test

Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A

Volumn 72, Issue 5, 2006, Pages 720-727

  Izumi, Satoshi ^a   Yamaguchi, Makoto ^a   Sasao, Kunihiko ^a   Sakai, Shinsuke ^a   Ueda, Yuzuru ^a   Suzuki, Atsushi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Bending; Brittle Fracture; Etching Damage; Finite Element Method; Fracture Mechanics; Material Testing; MEMS; Roughness

Indexed keywords

BENDING (DEFORMATION); BRITTLE FRACTURE; FINITE ELEMENT METHOD; FRACTURE MECHANICS; MATERIALS TESTING; MICROELECTROMECHANICAL DEVICES; SURFACE ROUGHNESS;

BENDING TESTS; ETCHING DAMAGE; NOTCHING ROUGHNESS;

STRENGTH OF MATERIALS;

EID: 33746637523     PISSN: 03875008     EISSN: None     Source Type: Journal    
DOI: 10.1299/kikaia.72.720     Document Type: Article

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