Investigation of modified thin SnO2 layers treated by rapid thermal annealing by means of hollow cathode spectroscopy and AFM technique

Journal of Physics D: Applied Physics

Volumn 39, Issue 15, 2006, Pages 3267-3271

  Djulgerova, R ^a   Popova, L ^a   Beshkov, G ^a   Petrovic, Z Lju ^b   Rakocevic, Z ^c   Mihailov, V ^a   Gencheva, V ^a   Dohnalik, T ^d  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b UNIVERSITY OF BELGRADE   (Serbia)

^c UNIVERSITY OF BELGRADE   (Serbia)

^d JAGIELLONIAN UNIVERSITY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; DEHYDRATION; DEPOLYMERIZATION; RAPID THERMAL ANNEALING; TIN COMPOUNDS;

ADSORPTION ABILITY; HEXAMETHYLDISILAZANE; HOLLOW CATHODE SPECTROSCOPY; SENSING LAYER;

THIN FILMS;

EID: 33746419167     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/15/008     Document Type: Article

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