Depth profile analysis of surface modified SnO2 gas sensors in a hollow cathode discharge

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 59, Issue 6, 2004, Pages 905-908

  Djulgerova, R B ^a   Popova, L I ^a   Mihailov, V I ^a   Beshkov, G D ^a   Szytula, A ^b   Gondek, L ^b   Petrovic, Z Lj ^c  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b JAGIELLONIAN UNIVERSITY   (Poland)

^c UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Depth profiling; Gas sensors; Hollow cathode discharge; SnO 2 SiO2 Si structure

Indexed keywords

CATHODE RAY TUBES; CHEMICAL SENSORS; MOSFET DEVICES; NITROGEN; POLYMERIZATION; PULSE AMPLITUDE MODULATION; PULSE GENERATORS; RAPID THERMAL ANNEALING; SILICON; SPECTROSCOPIC ANALYSIS; SPUTTERING; SUBSTRATES; TIN COMPOUNDS;

DEPTH PROFILING; GATE OXIDE LAYER; HOLLOW CATHODE DISCHARGE; LIQUID NITROGEN;

SURFACE TREATMENT;

EID: 2942609092     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2004.03.008     Document Type: Article

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