Mechanical property development in reactively sputtered tantalum carbide/amorphous hydrocarbon thin films

Journal of Materials Research

Volumn 21, Issue 6, 2006, Pages 1500-1511

  Evans, Ryan D ^a,b   Doll, Gary L ^a   Glass, Jeffrey T ^c  

^a TIMKEN COMPANY   (United States)

^b CASE WESTERN RESERVE UNIVERSITY   (United States)

^c DUKE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; AMORPHOUS FILMS; COMPRESSIVE STRESS; HYDROCARBONS; MECHANICAL PROPERTIES; STEEL; TANTALUM CARBIDE; TRIBOLOGY; WEAR RESISTANCE;

DIRECT CURRENT BIAS VOLTAGE LEVEL; STEEL TRIBOLOGICAL COMPONENT SURFACES; SUBSTRATE ROTATION RATE;

THIN FILMS;

EID: 33745999151     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2006.0174     Document Type: Article

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