Intrinsic stresses and mechanical properties of Ti-containing hydrocarbon coatings

Journal of Applied Physics

Volumn 94, Issue 1, 2003, Pages 186-194

  Shi, Bo ^a   Meng, W J ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; COMPOSITION; INDENTATION; NANOSTRUCTURED MATERIALS; PHYSICAL VAPOR DEPOSITION; STRESSES; TITANIUM;

NANOINDENTATION;

COATINGS;

EID: 0041840556     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1578523     Document Type: Article

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