Multilevel full-chip gridless routing considering optical proximity correction

Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC

Volumn 2, Issue , 2005, Pages 1160-1163

  Chen, Tai Chen ^a   Chang, Yao Wen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; PHOTOLITHOGRAPHY;

BENCHMARK CIRCUIT; CONGESTION ESTIMATION; DETAILED ROUTING; GRIDLESS ROUTER; NANOMETER EFFECT; OPTICAL PROXIMITY CORRECTIONS; PATTERN FEATURES; STATE OF THE ART;

WIRE;

EID: 33745949981     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1145/1120725.1120930     Document Type: Conference Paper

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