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Volumn 5, Issue , 2003, Pages 3708-3713
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H∞ loop shaping design for nano-positioning
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Author keywords
[No Author keywords available]
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Indexed keywords
BANDWIDTH;
NANOTECHNOLOGY;
PIEZOELECTRIC MATERIALS;
ROBUSTNESS (CONTROL SYSTEMS);
NANO-POSITIONING;
CONTROL SYSTEM ANALYSIS;
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EID: 0142231367
PISSN: 07431619
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (31)
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References (10)
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