Thin film NiTi microthermostat array

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 37-41

  Shin, Daniel D ^a   Lee, Dong Gun ^a   Mohanchandra, Kotekar P ^a   Carman, Gregory P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Flow restriction; Microthermostat; NiTi; Shape memory alloy

Indexed keywords

ARRAYS; FLUID MECHANICS; NICKEL COMPOUNDS; PRESSURE EFFECTS; SHAPE MEMORY EFFECT; THERMAL EFFECTS; THIN FILMS;

ENVIRONMENTAL FLUID TEMPERATURE; FLOW RESTRICTION; MICROTHERMOSTATS; NITI; ROOM TEMPERATURE;

THERMOSTATS;

EID: 33745809463     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.10.010     Document Type: Article

References (17)

1. W. Diermayer, L. Kutzner, Draft Control Arrangement for Vent of Combustion Apparatus, U.S. Patent 4,337,892, 6 July 1982.
2. W.R. Reedy, Refrigerant Expansion Device, U.S. Patent 4,429,552, 7 February 1984.
3. M. Koyama, K. Kinoshita, H. Matsuo, K. Okada, Coffee Kettle, U.S. Patent 4,667,584, 26 May 1987.
4. A.S. Drucker, Refrigerant Expansion Device for Optimizing Cooling and Defrost Operation of a Heat Pump, U.S. Patent 5,025,640, 25 June 1991.
5. C.L. Watson, J.A. Morrow, Temperature Adjusting Automatic Choke system, U.S. Patent 5,511,519, 30 April 1996.
6. Hahm G., Kahn H., Phillips S.M., and Heuer A.H. Fully microfabricated silicon spring biased, shape memory actuated microvalve. Solid-State Sensors and Actuator Workshop. Hilton Head, South Carolina, 4-8 June (2000) 230
7. Lai B.K., Hahm G., You L., Shih C.L., Kahn H., Phillips S.M., and Heuer A.H. The characterization of TiNi shape-memory actuated microvalves. Materials Research Society Symposium Proceedings, vol. 657 (2001) p. EE8.3.1
8. Vandelli N., Wroblewski D., Velonis M., and Bifano T. Development of a MEMS microvalve array for fluid flow control. J. Microelectromech. Syst. 7 (1998) 395
9. Ohnstein T., Fukiura T., Ridley J., and Bonne U. Micromachined silicon microvalve. IEEE Proceedings on Micro Electro Mechanical Systems, 11-14 February (1990) 95
10. Watanabe T., and Kuwano H. A microvalve matrix using piezoelectric actuators. Microsyst. Tech. 3 (1997) 107
11. Chakraborty I., Tang W.C., Bame D.P., and Tang T.K. MEMS micro-valve for space applications. Sens. Actuators A 83 (2000) 188
12. Hosokawa K., and Maeda R. Low-cost technology for high-density microvalve arrays using polydimethysiloxane (PDMS). The 14th IEEE International Conference. MEMS 2001, 21-25 January (2001) 531
13. Kruelevitch P., Lee A., Ramsey P., and Northrup M. Thin film shape memory alloy microactuators. J. Microelectromech. Syst. 5 (1996) 270
14. Li B., Chen Q., Lee D.G., Woolman J., and Carman G.P. Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps. Sens. Actuators A 117 (2005) 325
15. Lee D., Shin D.D., Carman G.P., and Chen Q. Microvalves for SMA-based CHAD. SPIE's 10th Annual International Symposium on Smart Structures and Materials, vol. 5055, 3 March (2003) 300
16. Lee D.G., Shin D.D., and Carman G.P. High performance microvalve array. ASME International Mechanical Engineering Congress and Exposition, IMECE, 5-11 November 2005 (2005)
17. Mohanchandra K.P., Ho K.K., and Carman G.P. Electrical characterization of NiTi film on silicon substrate. J. Intell. Mater. Syst. Struct. 15 (2004) 387