A microvalve matrix using piezoelectric actuators

Microsystem Technologies

Volumn 3, Issue 3, 1997, Pages 107-111

  Watanabe, T ^a   Kuwano, H ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2542605432     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050065     Document Type: Article

References (9)

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3. Zengerle R; Ulrich J; Kluge S; Richter M; Richter A (1995) A bidirectional silicon micropump, Sensors and Actuators A50, 81-86
4. Gerlach T; Wurmus H (1995) Working principle and performance of the dynamic micropump, Sensors and Actuators A50, 135-140
5. Olsson A; Enoksson P; Stemme G; Stemme E (1996) An improved valve-less pump fabricated using deep reactive ion etching, MEMS'96, 479-484
6. Stehr M; Messner S; Sandmaier H; Zengerle R (1996) A new micropump with bidirectional fluid transport and selfblocking effect, MEMS'96, 485-490
7. Yanagisawa K; Kuwano H; Tago A (1993) An electromagnetically driven microvalve, 7th Int. Conf. on Solid-State-Sensors and Actuators, 102-105
8. Fukui S; Kaneko R (1988) Analysis of ultra-thin gas film lubrication based on linearized Boltzmann equation: First report Derivation of a generalized lubrication equation including thermal creep flow, Trans. of the ASME J. of Tribology, Vol. 110, 253-262
9. Fukui S; Kaneko R (1990) A database for interpolation of Poiseuille flow rates for high Knudsen number lubrication problems, Trans. of the ASME J. of Tribology, Vol. 112, 78-83