Electrical characterization of NiTi film on silicon substrate

Journal of Intelligent Material Systems and Structures

Volumn 15, Issue 5, 2004, Pages 387-392

  Mohanchandra, K P ^a   Ho, Ken K ^a   Carman, Greg P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Electrical resistivity; NiTi film; Sputter deposition

Indexed keywords

AMORPHOUS FILMS; ANNEALING; BACKSCATTERING; COOLING; CRYSTALLINE MATERIALS; CRYSTALLIZATION; DIFFERENTIAL SCANNING CALORIMETRY; ELECTRIC RESISTANCE; MAGNETRON SPUTTERING; MARTENSITE; MICROELECTROMECHANICAL DEVICES; PHASE TRANSITIONS; SHAPE MEMORY EFFECT; SILICON; SPUTTER DEPOSITION; THIN FILMS;

ELECTRICAL CHARACTERIZATION; MARTENSITIC TRANSFORMATION; SILICON SUBSTRATES;

NICKEL ALLOYS;

EID: 2442656897     PISSN: 1045389X     EISSN: None     Source Type: Journal    
DOI: 10.1177/1045389X04045228     Document Type: Article

References (12)

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