Improvements in post-OPC data constraints for enhanced process corrections

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6154 III, Issue , 2006, Pages

  Burns, Ryan L ^a   Cui, Yuping ^a   Zhao, Zengqin ^a   Stobert, Ian ^a   LaCour, Pat ^b   Yehia, Ayman ^b   Madkour, Kareem ^b   Gheith, Mohamed ^b   Seoud, Ahmed ^b  

^a IBM   (United States)

^b MENTOR GRAPHICS CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EDGE PLACEMENT ERROR (EPE); OPC SOFTWARE; OPTICAL PROXIMITY CORRECTION (OPC); OPTICAL RULES CHECKING (ORC);

ARRAYS; COMPUTER SIMULATION; COMPUTER SOFTWARE; CONSTRAINT THEORY; EDGE DETECTION; MATHEMATICAL MODELS; PHOTOLITHOGRAPHY; ROBUSTNESS (CONTROL SYSTEMS);

ABERRATIONS;

EID: 33745792768     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656649     Document Type: Conference Paper

References (6)

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5. th Annual BACUS Symposium, Proc SPIE Vol 5567, p. 1296-1304, 2004
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