Experimental evaluation of Bulls-Eye illumination for assist-free, random contact printing at sub-65nm node

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6154 I, Issue , 2006, Pages

  Finders, Jo ^a   Engelen, Andre ^a   Vandenberghe, Geert ^b   Bekaert, Joost ^b   Chen, Tim ^c  

^a ASML   (Netherlands)

^b IMEC   (Belgium)

^c ASML US Inc   (United States)

Author keywords

Bulls Eye; CH printing; Off axis illumination; Source optimization

Indexed keywords

BULLS-EYE; CH PRINTING; OFF-AXIS ILLUMINATION; SOURCE OPTIMIZATION;

ERROR ANALYSIS; MASKS; PRINTED CIRCUITS; RANDOM PROCESSES; WSI CIRCUITS;

PATTERN RECOGNITION;

EID: 33745780501     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.659420     Document Type: Conference Paper

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