Practical method for full-chip optical proximity correction

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3051, Issue , 1997, Pages 790-803

  Chen, Jang Fung ^a   Laidig, Tom ^a   Wampler, Kurt E ^a   Caldwell, Roger ^a  

^a MicroUnity Systems Engineering Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE PROCESSING; MICROCOMPUTERS; PHOTOLITHOGRAPHY; ULTRAVIOLET RADIATION;

DEEP ULTRAVIOLET; OPTICAL MICROLITHOGRAPHY; OPTICAL PROXIMITY CORRECTION;

PROXIMITY SENSORS;

EID: 0031354033     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.276060     Document Type: Conference Paper

References (2)