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Volumn 126, Issue 1, 2006, Pages 14-18

Selective electrodeposition technology for organic insulator films on microelectromechanical-system structures

Author keywords

Electrical short; Electrodeposition; Insulator; MEMS; Reliability; Selective; Self limiting

Indexed keywords

ELECTRICAL SHORT; FABRICATED STRUCTURES; GOLD ELECTRODE;

EID: 33745678318     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.126.14     Document Type: Article
Times cited : (5)

References (12)
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    • Micromachining a miniaturized capillary electrophoresis-based chemical analysis system on a chip
    • D. J. Harrison, K. Fluri, K. Seiler, Z. Fan, C. S. Effenhauser and A. Manz : "Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System on a Chip", Science, Vol.261, pp.895-897 (1993)
    • (1993) Science , vol.261 , pp. 895-897
    • Harrison, D.J.1    Fluri, K.2    Seiler, K.3    Fan, Z.4    Effenhauser, C.S.5    Manz, A.6
  • 7
    • 0026867707 scopus 로고
    • Voltammetry of covalently immobilized cytochrome c on self-assembled monolayer electrodes
    • M. Collinson, E. F. Bowden, and M. J. Tarlov : "Voltammetry of Covalently Immobilized Cytochrome c on Self-Assembled Monolayer Electrodes", Langmuir, Vol.8, pp.1247-1250 (1992)
    • (1992) Langmuir , vol.8 , pp. 1247-1250
    • Collinson, M.1    Bowden, E.F.2    Tarlov, M.J.3
  • 8
    • 0000147327 scopus 로고
    • Characterization of cytochrome c/alkanethiolate structures prepared by self-assembly on gold
    • S. Song, R. A. Clark, E. F. Bowden, and M. J. Tarlov : "Characterization of Cytochrome c/Alkanethiolate Structures Prepared by Self-Assembly on Gold", J. Phys. Chem., Vol.97, pp.6564-6572 (1993)
    • (1993) J. Phys. Chem. , vol.97 , pp. 6564-6572
    • Song, S.1    Clark, R.A.2    Bowden, E.F.3    Tarlov, M.J.4
  • 9
    • 23244450041 scopus 로고    scopus 로고
    • Electrolyzed activate insulation electro coating system
    • I. Kawakami: "Electrolyzed Activate Insulation Electro Coating System", Techno-Cosmos, Vol.16, pp.72-73 (2003)
    • (2003) Techno-cosmos , vol.16 , pp. 72-73
    • Kawakami, I.1
  • 12
    • 0001368234 scopus 로고
    • Dielectric breakdown in silicon dioxide films on silicon
    • C. M. Osburn and D. W. Ormond "Dielectric Breakdown in Silicon Dioxide Films on Silicon", J. Electrochem. Soc., Vol.119, pp. 591-597 (1972)
    • (1972) J. Electrochem. Soc. , vol.119 , pp. 591-597
    • Osburn, C.M.1    Ormond, D.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.