A new fabrication process for low-loss millimeter-wave transmission lines on silicon

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 4 B, 2000, Pages 1982-1986

  Ishii, Hiromu ^a   Sahri, Nabil ^a   Nagatsuma, Tadao ^a   Machida, Katsuyuki ^a   Saito, Kunio ^a   Yagi, Shouji ^a   Yano, Masaki ^b   Kudo, Kazuhisa ^b   Kyuragi, Hakaru ^a  

^a NTT CORPORATION   (Japan)

^b NTT Advanced Technology Corporation   (Japan)

Author keywords

CPW; EOS; Millimeter wave; Silicon; Transmission; ULSI; Waveguide

Indexed keywords

ATTENUATION; CHEMICAL POLISHING; DIELECTRIC LOSSES; ELECTROMAGNETIC WAVE TRANSMISSION; ELECTRONIC EQUIPMENT MANUFACTURE; ELECTROOPTICAL EFFECTS; ELECTROPLATING; PERMITTIVITY; SEMICONDUCTING SILICON; SUBSTRATES; ULSI CIRCUITS;

CHEMICAL MECHANICAL POLISHING; MILLIMETER WAVE SYSTEMS; MILLIMETER WAVE TRANSMISSION LINES; SELECTIVE ELECTROPLATING; SILICON TECHNOLOGY;

WAVEGUIDES;

EID: 0033687723     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.1982     Document Type: Article

References (14)

1. D. Harame, S. Subbanna, J. Dunn, S. A. St. Onge, G. Freeman, J. Malinowski, R. Groves, A. Joseph, D. Ahlgren, R. Johnson, M. Zierak and D. Coolbaugh: Abstr. (Int. Joint Meet. 1999); The Electrochemical Society, The Electrochemical Society of Japan and Japan Society of Applied Physics 99-2 No. 1333.
2. K. Machida, S. Shigematsu, H. Morimura, N. Shimoyama, Y. Tanabe, T. Kumazaki, K. Kudou, M. Yano and H. Kyuragi: IEEE Int. Electron Devices Meet. Tech. Dig. (1999) p. 887.
3. P. Russer: IEEE Trans. Microwave Theory & Tech. 46 (1998) 590.
4. K. J. Herrick and T. A. Schwarz: IEEE Trans Microwave Theory & Tech. 46 (1998) 762.
5. K. J. Herrick, J.-G. Yook and L. P. B. Katehi: IEEE Microwave Theory & Tech. 46 (1998) 1832.
6. T. Nagatsuma, K. Machida, H. Ishii, N. Sahri, M. Shinagawa, H. Kyuragi and J. Yamada: Abstr. Advanced Workshop on Frontier in Electronics (WOFE 99) (1999) p. 23.
7. A. Dehe, H. Klingbeil, C. Weil and H. L. Hartnagel: IEEE Microwave & Guided Wave Lett. 8 (1998) 185.
8. W. R. McGrah, C. Walker, M. Yap and Y.-C. Tai: IEEE Microwave & Guided Wave Lett. 3 (1993) 61.
9. C.-M. Nam and Y.-S. Kwon: IEEE Microwave & Guided Wave Lett. 8 (1998) 369.
10. V. Milanovic, M. Gaitan, E. D. Bowen and M. Zaghloul: IEEE Microwave Theory & Tech. 45 (1997) 630.
11. N. Sahri, T. Nagatsuma, K. Machida, H. Ishii and H. Kyuragi: to be published in Proc. 29th European Microwave Conf., Munich, 1999.
12. T. Nagatsuma: IEICE Trans. Electron. E79-C (1996) 482.
13. N. Shimizu, N. Watanabe, T. Furuta and T. Ishibashi: IEEE Photonics Tech. Lett. 10 (1998) 412.
14. T. Otsuji, T. Nagatsuma, K. Kato and M. Yoneyama: Opt. Quantum Electron. 28 (1996) 991.