Fabrication of optical microelectromechanical-system switches having multilevel mirror-drive electrodes

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 9 A, 2004, Pages 6468-6472

  Ishii, Hiromu ^a   Urano, Masami ^a   Tanabe, Yasuyuki ^a   Shimamura, Toshishige ^a   Yamaguchi, Joji ^a   Kamei, Toshikazu ^b   Kudou, Kazuhisa ^b   Yano, Masaki ^b   Uenishi, Yuji ^a   Machida, Katsuyuki ^a  

^a NTT CORPORATION   (Japan)

^b NTT Advanced Technology Corporation   (Japan)

Author keywords

Add on; Electrode; Gold multilevel interconnection; Mirror; Optical MEMS switch

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRODES; LSI CIRCUITS; MIRRORS; OPTICAL SWITCHES;

GOLD ELECTROPLATING; GOLD MULTILEVEL INTERCONNECTION; MULTILEVEL INTERCONNECTION;

MICROELECTROMECHANICAL DEVICES;

EID: 9144253468     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.6468     Document Type: Article

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