Design and fabrication of a micro electro mechanical systems-based electrolytic tilt sensor

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 6 B, 2006, Pages 5626-5630

  Kang, Ik Su ^a   Jung, Ho ^a   Kim, Chang Jin ^a   Kwon, Byong Jo ^a   Kim, Woo Jeong ^b   Choi, Sie Young ^a   Lee, Jong Hyun ^a   Shin, Jang Kyoo ^a   Kong, Seong Ho ^a  

^a Kyungpook National University   (South Korea)

^b MENTech Co Ltd   (South Korea)

Author keywords

Electrolyte; Electrolytic; Inclinometer; MEMS; Shadow mask; Tilt sensor

Indexed keywords

ELECTROLYTES; ETCHING; SENSORS; SILICON WAFERS;

ELECTROLYTIC; INCLINOMETER; MEMS; SHADOW MASK; TILT SENSOR;

MICROELECTROMECHANICAL DEVICES;

EID: 33745648353     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.5626     Document Type: Review

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