Spray coating fabrication: Thin film formation on non-planar surface

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 825-828

  Ichiki, M ^a   Zhang, L ^a   Yang, Z ^a   Ikehara, T ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Coatings; Fabrication; Ferroelectric films; Ferroelectric materials; Heat treatment; Magnetic hysteresis; Micromechanical devices; Spraying; Surface treatment; Transistors

Indexed keywords

ACTUATORS; COATING TECHNIQUES; COATINGS; DEPOSITION; FABRICATION; FERROELECTRIC FILMS; FERROELECTRIC MATERIALS; FERROELECTRICITY; FILM GROWTH; FILMS; HEAT TREATMENT; HYSTERESIS; INTELLIGENT MATERIALS; MAGNETIC ACTUATORS; MAGNETIC HYSTERESIS; MAGNETIC MATERIALS; MICROSYSTEMS; SPRAYING; SURFACE TREATMENT; THIN FILMS; TRANSDUCERS; TRANSISTORS;

HYDROPHILIC AND HYDROPHOBIC PROPERTIES; INTEGRATION TECHNOLOGIES; MICROMECHANICAL DEVICE; P-E HYSTERESIS LOOPS; PEROVSKITE STRUCTURES; SENSORS AND ACTUATORS; THIN FILM FORMATION; THREE-DIMENSIONAL MICRO-FABRICATION;

SOLID-STATE SENSORS;

EID: 34548164490     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215601     Document Type: Conference Paper

References (12)

1. e.g. M. Sasaki, and K. Hane, "Spray coating of photoresist for three-dimensional micromachining" J.IEEE Japan-E, 122, 235-243, 2002.
2. 3 thin film for AFM data-storage" Proc. of SPIE, 4601, 379-383, 2001.
3. 3(PZT) film by electrostatic spray deposition (ESD) for application in microsystem technology" Jpn.J.Appl.Phys. 41, 4317-4320, 2002.
4. S. Kasyu, E. Fuchita, T. Manabe and C. Hayashi, "Deposition of ultra fine particles using a gas jet" Jpn.J.Appl.Phys. 36, L910-912, 1984.
5. H. Adachi, Y. Kuroda, T. Iwahashi and K. Yanagisawa, "Preparation of piezoelectric thick films using a jet printing system" Jpn.J.Appl.Phys. 36, 1159-1163, 1997.
6. A. Schroth, R. Maeda, J. Akedo and M. Ichiki, "Application of gas jet deposition method to piezoelectric thick film miniature actuator" Jpn.J.Appl.Phys. 37,5342-5344, 1998.
7. M. Shimizu, S. Hyodo, H. Fujisawa, H. Niu and T. Shiosaki, "Step coverage characteristics of Pb(Zr, Ti)O3 thin films on various electrode materials by metal-organic chemical vapor deposition" Jpn.J.Appl.Phys. 36, 5808-5811, 1997.
8. H. Fujisawa, K. Kita, M. Shimizu and H. Niu "Low-temperature fabrication of Ir/Pb(Zr, Ti)O3/Ir capacitors solely by metal-organic chemical vapor deposition" Jpn.J.Appl.Phys. 40, 5551-5553, 2001.
9. Z.J. Wang, R. Maeda and K. Kikuchi "Development of phases and texture in sol-gel derived lead zirconate titanate thin films prepared by three-step heat-treatment process" J.Mat.Sci. 35, 5915-5919, 2000.
10. Z.J. Wang, R. Maeda and K. Kikuchi "Effect of Pb content on microstructure and electrical properties of sol-gel derived PZT thin films" Mat.Res.Soc.Symp.Proc. 596, 229-234, 2000.
11. J. Lu, J. Chu, W. Huang and Z. Ping "Microstructure and electrical properties of PZT thick film prepared by electrostatic spray deposition" Proc. of MEMS 2002 Workshop Digest, p79-182 (2002).
12. T. Shiosaki, Y. Miyasaka, H. Mochizuki and K. Sakiyama, Advanced process for ferroelectric memory, Science Forum, Tokyo, 1999.