On a micromachined fluidic inclinometer

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1279-1282

  Yotter, R A ^a   Baxter, R R ^a   Ohno, S ^b   Hawley, S D ^a   Wilson, D M ^a  

^a University of Washington   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Capacitance measurement; Dielectric constant; Dielectric measurements; Fabrication; Fluidic microsystems; Geometry; Linearity; Microfluidics; Surface tension; System testing

Indexed keywords

ACTUATORS; AIR; CAPACITANCE; CAPACITANCE MEASUREMENT; FABRICATION; GEOMETRY; MICROFLUIDICS; MICROSYSTEMS; PERMITTIVITY; SURFACE TENSION; TRANSDUCERS;

AMPHIPHILIC MOLECULES; CAPACITANCE CHANGE; DIELECTRIC MEASUREMENTS; FLUIDIC INCLINOMETERS; FLUIDIC MICROSYSTEMS; LARGE DIELECTRIC CONSTANT; LINEARITY; SYSTEM TESTING;

SOLID-STATE SENSORS;

EID: 84886836877     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217006     Document Type: Conference Paper

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