Mask-under-etch experiments of Si{110} in TMAH

Canadian Conference on Electrical and Computer Engineering

Volumn 3, Issue , 1999, Pages 1621-1626

  Pandy, A ^a   Landsberger, L M ^a   Kahrizi, M ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIUM COMPOUNDS; COMPOSITION; CRYSTAL MICROSTRUCTURE; ETCHING; OPTICAL MICROSCOPY; OXIDES; SCANNING ELECTRON MICROSCOPY; SURFACES;

ETCHANT; INCLINATION ANGLE; TETRAMETHYLAMMONIUM HYDROXIDE; WAGON WHEEL PATTERN;

SILICON WAFERS;

EID: 0033310426     PISSN: 08407789     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)