Three-dimensional rigorous simulation of EUV defective masks using modal method by fourier expansion

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 II, Issue , 2006, Pages

  Smaali, Rafik ^a   Besacier, Maxime ^a   Schiavone, Patrick ^a  

^a CEA GRENOBLE   (France)

Author keywords

3D electromagnetic simulation; Absorber pattern; Aerial image; Defective mask; EUV lithography; Modal method

Indexed keywords

COMPUTER SIMULATION; ELECTROMAGNETIC FIELD EFFECTS; MODAL ANALYSIS; PHOTOLITHOGRAPHY; THREE DIMENSIONAL; ULTRAVIOLET RADIATION;

3D ELECTROMAGNETIC SIMULATION; ABSORBER PATTERN; AERIAL IMAGE; EUV LITHOGRAPHY; MODAL METHOD;

MASKS;

EID: 33745625613     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.655495     Document Type: Conference Paper

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