Soft lithography using perfluorinated polyether molds and PRINT technology for fabrication of 3-D arrays on glass substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 II, Issue , 2006, Pages

  Wiles, Kenton B ^a   Wiles, Natasha S ^a   Herlihy, Kevin P ^a   Maynor, Benjamin W ^a   Rolland, Jason P ^d   Desimone, Joseph M ^a,b,c  

^a University of North Carolina at Chapel Hill   (United States)

^b UNIVERSITY OF NORTH CAROLINA SCHOOL OF MEDICINE   (United States)

^c UNIVERSITY OF NORTH CAROLINA   (United States)

^d Liquidia Technologies Inc   (United States)

Author keywords

3 D Array; Perfluoropolyether; Polydimethylsiloxane; Self Assembled Monolayer; Soft Lithography

Indexed keywords

3-D ARRAYS; PERFLUOROPOLYETHERS; POLYDIMETHYLSILOXANE; SOFT LITHOGRAPHY;

GLASS; MICROELECTRONICS; MOLDS; MONOLAYERS; POLYETHERS; SELF ASSEMBLY;

LITHOGRAPHY;

EID: 33745603001     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656612     Document Type: Conference Paper

References (14)

1. von Werne, T. A.; Germack, D. S.; Hagberg, E. C.; Sheares, V. V.; Hawker, C. J. and Carter, K. R. J. Am. Chem. Soc. 2003, 125, 3831.
2. Klopp, J. M.; Pasini, D.; Byers, J. D.; Willson, C. G. and Frechet, J. M. J. Chem. Mater. 2001, 13, 4147.
3. Ma, Q. G.; Remsen, E. E.; Kowalewski, T. and Wooley, K. L. J. Am. Chem. Soc. 2001, 123, 4627.
4. Miller, R. D. Science 1999, 286, 421.
5. Langer, R.S. Nature, 1998, 392, 5.
6. Rolland, J. P.; Maynor, B. W.; Euliss, L. E.; Exner, A. E.; Denison, G. M. and DeSimone, J. M. J. Am Chem. Soc. 2005, 127, 10096.
7. Carter, K. R.; Terris, B. D.; Best, M. E.; Hart, M. W.; Rettner, C. T. and McClelland, G. M. Polymer Preprints 2002, 8, 403.
8. Rolland, J. P.; Hagberg, E. C.; Denison, G. M.; Carter, K. R. and DeSimone, J. M. Angew, Chem. Int. Ed. 2004, 43, 5796.
9. Rolland, J. P.; Van Dam, R. M.; Schorzman, E. A.; Quake, S. R. and DeSimone, J. M. J. Am. Chem. Soc. 2004, 126, 8349.
10. Xia, Y. N. and Whitesides, G. M. Angew. Chem. Int. Ed. 1998, 37, 551.
11. Xia, Y. N.; Rogers, J. A.; Paul, K. E. and Whitesides, G. M. Chem. Rev. 1999, 99, 1823.
12. Xu, Q. B.; Tonks, I.; Fuerstman, M. J.; Love, J. C. and Whitesides, G. M. Nano. Lett. 2004, 4, 2509.
13. Bailey, T.; Choi, B. J.; Colburn, M.; Meissl, M.; Shaya, S.; Ekerdt, J. G.; Screenvasan, S. V. and Wilson, C. G. J. Vac. Sci. Technol., B 2000, 18, 3572.
14. Priola, A.; Bongiovanni, R.; Malucelli, G.; Pollicino, A.; Tonelli, C. and Simeone, G. Macromol. Chem. Phys. 1997, 198, 1893.