Contact molding for nanoscopic pattern transfer

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Volumn 43, Issue 1, 2002, Pages 403-404

  Carter, Kenneth R ^a   Terris, Bruce D ^a   Best, Margaret E ^a   Hart, Mark W ^a   Rettner, Charles T ^a   McClelland, Gary M ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84899761761     PISSN: 00323934     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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5. Bailey, T.; Choi, B. J.; Colburn, M.; Meissl, M.; Shiya, S.; Ekerdt, J. G.; Sreenivasan, S. V.; Wiliaon, C. G. J. Vac. Sci. Techmol., B 2000, 18, 3572.
6. Van den Broek, A. J. M.; Legierse, P. E. J. Photogr. Sci. Eng. 1984, 28, 128.