Electrical characterization and surface morphology of optimized Ti/Al/Ti/Au ohmic contacts for AlGaN/GaN HEMTs

Journal of the Electrochemical Society

Volumn 153, Issue 8, 2006, Pages

  Bardwell, J A ^a,b   Haffouz, S ^a   Tang, H ^a   Wang, R ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b ELECTROCHEMICAL SOCIETY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EDGE ACUITY; ELECTRICAL CHARACTERIZATION; LOW RESISTANCE OHMIC CONTACTS;

ELECTRIC PROPERTIES; HIGH ELECTRON MOBILITY TRANSISTORS; OHMIC CONTACTS; SEMICONDUCTING FILMS; TITANIUM ALLOYS;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 33745513254     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2206998     Document Type: Article

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