Discrete-path transport theory of physical sputtering

Journal of Applied Physics

Volumn 92, Issue 3, 2002, Pages 1699-1708

  Stepanova, M ^a   Dew, S K ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL SPUTTERING; KINETIC MODELING; LINEARIZED BOLTZMANN EQUATION; LOW ENERGIES; MASTER EQUATIONS; NUMERICAL RESULTS; PARTICLE TRANSPORT; PHYSICAL SPUTTERING; SEMI-INFINITE TARGET; SUB-KEV; TRANSPORT THEORY;

BOLTZMANN EQUATION; KINETIC THEORY;

STATISTICAL MECHANICS;

EID: 0036678417     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1488245     Document Type: Article

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