Low-voltage resistive switching of polycrystalline SrZrO3: Cr thin films grown on Si substrates by off-axis rf sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 970-973

  Park, Jae Wan ^a,b   Park, Jong Wan ^b   Yang, Min Kyu ^a   Jung, Kyooho ^a   Kim, Dal Young ^a   Lee, Jeon Kook ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; ELECTRIC POTENTIAL; SILICON; SPUTTERING; STRONTIUM; SWITCHING SYSTEMS; THIN FILMS; ZIRCONIA;

RESISTIVE SWITCHING; RESPUTTERING EFFECTS; SWITCHING VOLTAGE;

POLYCRYSTALLINE MATERIALS;

EID: 33745495242     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2202126     Document Type: Article

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