Fabrication of amorphous silicon thin-film transistor by micro imprint lithography

Journal of Non-Crystalline Solids

Volumn 352, Issue 9-20 SPEC. ISS., 2006, Pages 1704-1707

  Choo, Byoung Kwon ^a   Choi, Jung Su ^a   Kim, Se Whan ^a   Park, Kyu Chang ^a   Jang, Jin ^a  

^a Kyung Hee University   (South Korea)

Author keywords

Amorphous semiconductors; Spin coating; Thin film transistors

Indexed keywords

ELECTRON MOBILITY; LITHOGRAPHY; ORGANIC POLYMERS; REACTIVE ION ETCHING; THIN FILM TRANSISTORS; THRESHOLD VOLTAGE;

AMORPHOUS FLUOROPOLYMER; AMORPHOUS SEMICONDUCTORS; FIELD-EFFECT MOBILITY; MICRO IMPRINT LITHOGRAPHY;

AMORPHOUS SILICON;

EID: 33745456934     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2005.10.065     Document Type: Article

References (14)

1. Chen Y., Macintyre D.S., Boyd E., Moran D., Thayne I., and Thoms S. Microelectron. Eng. 67&68 (2003) 189
2. Wu W., Gu J., Ge H., Keimel C., and Chou S.Y. Appl. Phys. Lett. 83 (2003) 2268
3. S.H. Kim, J.H. Hur, K.M. Kim, J. Jang, in: Proceedings of the First International TFT Conference (2005) 146.
4. Lee S.W., Choo B.K., Kim D.Y., Kim K.S., and Jang J. SID International Symposium Digest Technology paper (2002) 916
5. Yoo S.S., Cho H.L., Kwon O.N., Nam S.H., Chang Y.G., Kim K.Y., Cha S.Y., Ahn B.C., and Chung I.J. International Meeting on Information Display (2005) 948
6. Xia Y., and Whitesides G.M. Annu. Rev. Mater. Sci. 28 (1998) 153
7. Hu J., Beck R.G., Deng T., Westervelt R.M., Maranowski K.D., Gossard A.C., and Whitesides G.M. Appl. Phys. Lett. 71 (1997) 6
8. Kim E., Xia Y., and Whitesides G.M. Nature 376 (1995) 581
9. Xia Y., Kim E., Zhao X.-M., Rogers J.A., Prentiss M., and Whitesides G.M. Science 273 (1996) 347
10. Choi W.M., and Park O.O. Microelectron. Eng. 70 (2003) 131
11. Cheng X., and Guo L.J. Microelectron. Eng. 71 (2004) 277
12. Choi D.K., Hur J.H., Kim H.J., Nam H.C., Maghsoodi S., Warner R.R., Cerny G.A., and Jang J. Internal Display Workshop 3-5 (2003) 391
13. Won S.H., Chung J.K., Lee C.B., Nam H.C., Hong M., Kim B.S., Lee Y.U., Yang S.H., Huh J.M., Park K.C., and Jang J. Society for International Display 336 (2003) 992
14. Globus T., Slade H.C., Shur M., and Hack M. Mat. Res. Soc. Symp. Proc. 336 (1994) 823