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Volumn 81, Issue 5, 2002, Pages 898-900

Effect of atmosphere during heating of substrate on the low temperature deposition of metalorganic chemical vapor deposited Pb(Zrx,Ti 1-x)O3 thin films

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS PHASE; CHEMICAL VAPOR DEPOSITED; LOW DEPOSITION TEMPERATURE; LOW-LEAKAGE CURRENT; LOW-TEMPERATURE DEPOSITION; METAL-ORGANIC; PZT; PZT FILM; SMOOTH SURFACE;

EID: 79956008261     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1497446     Document Type: Article
Times cited : (15)

References (11)
  • 1
    • 0001961010 scopus 로고
    • ferFEROA80015-0193
    • A. Mannish, Ferroelectrics 102, 69 (1990). ferFEROA80015-0193
    • (1990) Ferroelectrics , vol.102 , pp. 69
    • Mannish, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.