Diamond-like carbon thin films grown by large-area surface-wave mode microwave plasma CVD: Effects of stage distance to microwave window

Diamond and Related Materials

Volumn 15, Issue 4-8, 2006, Pages 913-916

  Adhikari, Sudip ^a   Omer, Ashraf M M ^a   Adhikary, Sunil ^a   Rusop, Mohamad ^b   Uchida, Hideo ^a   Umeno, Masayoshi ^a  

^a CHUBU UNIVERSITY   (Japan)

^b NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Diamond like carbon; Distance of microwave quartz window; Optical properties; Surface wave plasma

Indexed keywords

ABSORPTION; CARRIER CONCENTRATION; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROWAVES; NITROGEN; OPTICAL PROPERTIES; PLASMAS; QUARTZ; RAMAN SPECTROSCOPY; SILICON; SUBSTRATES; SURFACE WAVES; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND-LIKE CARBON; DISTANCE OF MICROWAVE QUARTZ WINDOW; MICROWAVE QUARTZ WINDOW; NITROGEN ATOMIC CONCENTRATION; SURFACE-WAVE PLASMA;

DIAMOND LIKE CARBON FILMS;

EID: 33745248380     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.12.012     Document Type: Article

References (15)

1. Mominuzzaman S.M., Krishna K.M., Soga T., Jimbo T., and Umeno M. Jpn. J. Appl. Phys. 38 (1999) 658
2. Hayashi Y., Ishikawa S., Soga T., Umeno M., and Jimbo T. Diamond Relat. Mater 12 (2003) 687
3. Rosop M., Mominuzzaman S.M., Soga T., Jimbo T., and Umeno M. Jpn. J. Appl. Phys. 42 (2003) 2339
4. Chen C.W., and Roberson J. Carbon 37 (1999) 839
5. Tian X.M., Rusop M., Hayashi Y., Soga T., Jimbo T., and Umeno M. Sol. Energy Mater. Sol. Cells 77 (2003) 105
6. Nagatsu M., Sano T., Takada N., Toyoda N., Tange M., and Sugai H. Diamond Relat. Mater 11 (2002) 976
7. S. Adhikari, S. Adhikary, A.M.M. Omer, M. Rusop, H. Uchida, T. Soga, M. Umeno. Diamond Relat. Mater (in press).
8. Omer A.M.M., Rusop M., Adhikari S., Adhikary S., Uchida H., and Umeno M. Diamond Relat. Mater 14 (2005) 1084
9. Kim J.H., Kim Y.H., Choi D.J., and Baik H.K. Thin Solid Films 289 (1996) 79
10. Tauc J., Grigorovici R., and Vancu A. Phys. Status Solidi 15 (1966) 527
11. Speranza G., Calliari L., Ferrari M., Chiasera A., Tran Ngoc K., Baranov A.M., Sleptsov V.V., Nefedov A.A., Varfolomeev A.E., and Fanchenko S.S. Appl. Surf. Sci. 238 (2004) 117
12. Scaf T.W., Ott R.D., Yang D., and Barnard J.A. J. Appl. Phys. 85 (1999) 3142
13. Paillard V., Melinon P., Dupuis V., Perez J.P., Perez A., and Champagnon B. Phys. Rev. Lett. 71 (1993) 4170
14. Mukhopadhyay K., Krishna K.M., and Sharun M. Mater. C: Phys. 49 (1997) 252
15. Ferrai A.C., and Robertson J. Phys. Rev., B 61 (2001) 14 095