Effect of calcination process on synthesis of ceria particles, and its influence on shallow trench isolation chemical mechanical planarization performance

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 6 A, 2006, Pages 4893-4897

  Kim, Dae Hyeong ^a   Kang, Hyun Goo ^b   Kim, Sang Kyun ^b   Paik, Ungyu ^b   Park, Jea Gun ^b  

^a KCTech   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

Agglomeration; Calcination; Ceria; Density; Particle size distribution; Slurry; STI CMP

Indexed keywords

CALCINATION; CARBONATES; CRYSTAL GROWTH; NITRIDES; PARTICLE SIZE ANALYSIS; SLURRIES;

CHEMICAL MECHANICAL PLANARIZATION (CMP) PERFORMANCE; OXIDE REMOVAL RATE; STI CMP;

CERIUM COMPOUNDS;

EID: 33745238060     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.4893     Document Type: Article

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