Organic amorphous fluoropolymer membrane for variable optical attenuator applications

Journal of Optics A: Pure and Applied Optics

Volumn 8, Issue 7, 2006, Pages

  Yeh, Yu Wei ^a   Chiu, Chen Wei E ^a   Su, Guo Dung J ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Amorphous fluoropolymer membrane; MEMS; Organic materials; Variable optical attenuator

Indexed keywords

AMORPHOUS MATERIALS; ATTENUATION; FINITE ELEMENT METHOD; FLUORINE CONTAINING POLYMERS; MICROELECTROMECHANICAL DEVICES; OPTICAL SYSTEMS; OPTICAL TRANSFER FUNCTION; PLASTIC DEFORMATION; THIN FILMS;

AMORPHOUS FLUOROPOLYMER MEMBRANES; OPTICAL ATTENUATION; VARIABLE OPTICAL ATTENUATOR;

POLYMERIC MEMBRANES;

EID: 33745205298     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/8/7/S14     Document Type: Article

References (21)

1. Cohen S 2000 Novel VOAs provide more speed and utility Laser Focus World 36 139-46
2. Isamoto K, Kato K, Morosawa A, Chong C, Fujita H and Toshihyoshi H 2004 A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining IEEE J. Sel. Top. Quantum Electron. 10 570-8
3. Bashir A, Katila P, Ogier N and Saadany B 2004 A MEMS-based VOA with very low PDL IEEE Photon. Technol. Lett. 16 1047-9
4. Marxer C, Griss P and de Rooij N F 1999 A variable optical attenuator based on silicon micromechanics IEEE Photon. Technol. Lett. 11 233-5
5. Syms R R A, Zou H, Stagg J and Moore D F 2004 MEMS variable optical attenuator with a compound latch Microelectron. Eng. 73/74 423-8
6. Zhang X M, Liu A Q, Lub C, Wang F and Liu Z S 2003 Polysilicon micromachined fibre-optical attenuator for DWDM applications Sensors Actuators A 108 28-35
7. Chiou J C and Lin W T 2004 Variable optical attenuator using a thermal actuator array with dual shutters Opt. Commun. 237 341-50
8. MacDonald et al 2002 US Patent Specification 6,462,858
9. Klauk H, Gundlach D J, Bonse M, Kuo C and Jackson TN 2000 A reduced complexity process for organic thin film transistors Appl. Phys. Lett. 76 1692-4
10. Burroughes J and Holmes A 1990 Light-emitting diodes based on conjugated polymers Nature 347 539-41
11. Ashby M F Materials Selection in Mechanical Design 3rd edn (Amsterdam: Elsevier)
12. Hsu P, Huang M, Wagner S, Suo Z and Sturn J 2000 Plastic deformation of thin foil substrates with amorphous silicon islands into spherical shape Mater. Res. Soc. Proc. 621 Q8.6.1-6
13. Robison et al 2000 US Patent Specification 6,123,985
14. Rolsma P B and Lee J N 1990 Polymer membrane properties and structures for membrane light modulator applications Opt. Lett. 15 712-4
15. Wagner R and Tomlison W 1982 Coupling efficiency of optics in single-mode fibre components Appl. Opt. 21 2671-88
16. ANSYS User Manual Chapter 2: Structures
17. Rebeiz G M RF MEMS Theory, Design, and Technology (New York: Wiley-Interscience)
18. Melin J, Hedsten K, Magnusson A, Karlén D, Rödjegrd H, Persson K, Bengtsson J, Enoksson P and Nikolajeff F 2005 Microreplication in a silicon processing compatible polymer material J. Micromech. Microeng. 15 116-21
19. Huang S, Chiu C, Su G and Jiang F 2005 Low voltage variable optical attenuator made by the low-cost micromachining wet-etching technique IQEC and CLEO-PR 2005 Proc. (July 2005) pCThC3-P13
20. Zhang X, Liu A, Lu C, Wang F and Liu Z 2003 Polysilicon micromachined fibre-optical attenuator for DWDM applications Sensors Actuators A 108 28-35
21. Solgaard O, Sandejas E S A and Bloom D M 1992 Deformable grating optical modulator Opt. Lett. 17 688-90