Micro-mirror arrays for adaptive optics fabricated in polymer technology

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1342-1345

  Friese, Christoph ^a   Zappe, Hans ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Adaptive optics; Electrostatic actuation; Membrane micro mirror; MicroChem SU 8; Polymer optic

Indexed keywords

ELECTROSTATIC ACTUATION; MEMBRANE MICRO-MIRRORS; MICROCHEM SU-8; POLYMER OPTICS;

ADAPTIVE OPTICS; ARRAYS; COSTS; DEFORMATION; ELECTRODES; ELECTROSTATICS; POLYMERS; PUMPS; SENSORS; VALVES (MECHANICAL);

MIRRORS;

EID: 27544451320     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497329     Document Type: Conference Paper

References (7)

1. S. Hippler, A. Glindemann, M. Kasper, P. Kalas, R. Rohloff, K. Wagner, D. P. Looze, and W. K. Hackenberg. ALFA: the MPIA/MPE adaptive optics with a laser for astronomy project. In Proc. SPIE Vol. 3353, p. 44-55, Adaptive Optical System Technologies, Domenico Bonaccini; Robert K. Tyson; Eds., pages 44-55, September 1998.
2. F. Gonte, Y. A. Peter, H. P. Herzig, and R. Daendliker. Massive free-space optical 1xN fiber switch using an adaptive membrane mirror. In Proc. SPIE Vol. 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, John D. Gonglewski; Mikhail A. Vomntsov; Mark T. Gruneisen; Eds., pages 64-70, February 2002.
3. J. Liang, D. R. Williams, and D. T. Miller. Super-normal vision and high-resolution retinal imaging through adaptive optics. Optical Society of America Journal A, 14:2884-2892, November 1997.
4. G. Vdovin and P. M. Sarro. Flexible mirror micro-machined in silicon. Applied Optics, 34:2968-2972, June 1995.
5. C. Friese, D. Mader, and H. Zappe. Polymer-based membrane mirrors for micro-optical sensors. In Proc. IEEE/LEOS Optical MEMS 2004, pages 215-215, September 2004.
6. E. H. Conradie and D. F. Moore. SU-8 thick photoresist processing as a functional material for MEMS applications. Journal of Micromechanics and Microengineering, 12(4):368-374, 2002.
7. F. J. Blanco, M. Agirregabiria, J. Garcia, J. Berganzo, M. Tijero, M.T. Arroyo, J. M. Ruano, I. Aramburu, and K. Mayora. Novel three-dimensional embedded SU-8 microchannels fabricated using a low temperature full wafer adhesive bonding. Journal of Micromechanics and Microengineering, 14(7):1047-1056, 2004.