-
1
-
-
0002861839
-
Nonlinearity in interferometric measurements
-
Quenelle R.C. Nonlinearity in interferometric measurements. Hewlett-Packard J 34 (1983)
-
(1983)
Hewlett-Packard J
, vol.34
-
-
Quenelle, R.C.1
-
2
-
-
84975582306
-
Residual errors in laser interferometry from air turbulence and nonlinearity
-
Bobroff N. Residual errors in laser interferometry from air turbulence and nonlinearity. Appl Opt 26 (1987) 2676-2682
-
(1987)
Appl Opt
, vol.26
, pp. 2676-2682
-
-
Bobroff, N.1
-
3
-
-
0023430468
-
Nonlinearity in length measurement using heterodyne laser Michelson interferometry
-
Sutton C.M. Nonlinearity in length measurement using heterodyne laser Michelson interferometry. J Phys E: Sci Instrum 20 (1987) 1290-1292
-
(1987)
J Phys E: Sci Instrum
, vol.20
, pp. 1290-1292
-
-
Sutton, C.M.1
-
4
-
-
0025022793
-
Optical sources of nonlinearity of heterodyne interferometers
-
Rosenboth A.E., and Bobroff N. Optical sources of nonlinearity of heterodyne interferometers. Precis Eng 12 (1990) 7-11
-
(1990)
Precis Eng
, vol.12
, pp. 7-11
-
-
Rosenboth, A.E.1
Bobroff, N.2
-
5
-
-
0002674964
-
Investigation and compensation of the nonlinearity of heterodyne interferometers
-
Hou W., and Wilkening G. Investigation and compensation of the nonlinearity of heterodyne interferometers. Precis Eng 14 2 (1992) 91-98
-
(1992)
Precis Eng
, vol.14
, Issue.2
, pp. 91-98
-
-
Hou, W.1
Wilkening, G.2
-
6
-
-
0027676980
-
Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry
-
De Freitas J.M., and Player M.A. Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry. Meas Sci Technol 4 (1993) 1173-1176
-
(1993)
Meas Sci Technol
, vol.4
, pp. 1173-1176
-
-
De Freitas, J.M.1
Player, M.A.2
-
7
-
-
0028196403
-
The drift of the nonlinearity of heterodyne interferometers
-
Hou W., and Zhao X. The drift of the nonlinearity of heterodyne interferometers. Precis Eng 16 1 (1994) 25-34
-
(1994)
Precis Eng
, vol.16
, Issue.1
, pp. 25-34
-
-
Hou, W.1
Zhao, X.2
-
8
-
-
0032182557
-
A simple technique for observing periodic nonlinearities in Michelson interferometers
-
Stone J.A., and Howard L.P. A simple technique for observing periodic nonlinearities in Michelson interferometers. Precis Eng 22 4 (1998) 220-232
-
(1998)
Precis Eng
, vol.22
, Issue.4
, pp. 220-232
-
-
Stone, J.A.1
Howard, L.P.2
-
9
-
-
0001461852
-
Heterodyne interferometer with subatomic periodic nonlinearity
-
Wu C.M., Lawall J., and Deslattes R.D. Heterodyne interferometer with subatomic periodic nonlinearity. Appl Optics 38 19 (1999) 4089-4094
-
(1999)
Appl Optics
, vol.38
, Issue.19
, pp. 4089-4094
-
-
Wu, C.M.1
Lawall, J.2
Deslattes, R.D.3
-
10
-
-
0000231342
-
Michelson interferometry with 10 pm accuracy
-
Lawall J., and Kessler E. Michelson interferometry with 10 pm accuracy. Rev Sci Instrum 71 7 (2000) 2669-2676
-
(2000)
Rev Sci Instrum
, vol.71
, Issue.7
, pp. 2669-2676
-
-
Lawall, J.1
Kessler, E.2
-
11
-
-
0033740427
-
A frequency domain method for the measurement of nonlinearity in heterodyne interferometry
-
Badami V.G., and Patterson S.R. A frequency domain method for the measurement of nonlinearity in heterodyne interferometry. Precis Eng 24 1 (2000) 41-49
-
(2000)
Precis Eng
, vol.24
, Issue.1
, pp. 41-49
-
-
Badami, V.G.1
Patterson, S.R.2
-
12
-
-
0034248191
-
The use of X-ray interferometry to investigate the linearity of the NPL differential plane mirror optical interferometer
-
Yacoot A., and Downs M.J. The use of X-ray interferometry to investigate the linearity of the NPL differential plane mirror optical interferometer. Meas Sci Technol 11 8 (2000) 1126-1130
-
(2000)
Meas Sci Technol
, vol.11
, Issue.8
, pp. 1126-1130
-
-
Yacoot, A.1
Downs, M.J.2
-
13
-
-
0035504635
-
The role of periodic interferometer errors in the calibration of capacitance displacement sensors for nanometrology applications
-
Koning R., Doxson R., Fu J., et al. The role of periodic interferometer errors in the calibration of capacitance displacement sensors for nanometrology applications. Meas Sci Technol 12 10 (2001) 1734-1738
-
(2001)
Meas Sci Technol
, vol.12
, Issue.10
, pp. 1734-1738
-
-
Koning, R.1
Doxson, R.2
Fu, J.3
-
14
-
-
0037091962
-
Elimination of heterodyne interferometer nonlinearity by carrier phase modulation
-
Dubovitsky S., Lay O.P., and Seidel D.J. Elimination of heterodyne interferometer nonlinearity by carrier phase modulation. Opt Lett 27 8 (2002) 619-621
-
(2002)
Opt Lett
, vol.27
, Issue.8
, pp. 619-621
-
-
Dubovitsky, S.1
Lay, O.P.2
Seidel, D.J.3
-
15
-
-
0037058361
-
Acousto-optic displacement-measuring interferometer: a new heterodyne interferometer with Angstrom-level periodic error
-
Schmitz T.L., and Beckwith J.F. Acousto-optic displacement-measuring interferometer: a new heterodyne interferometer with Angstrom-level periodic error. J Mod Optic 49 13 (2002) 2105-2114
-
(2002)
J Mod Optic
, vol.49
, Issue.13
, pp. 2105-2114
-
-
Schmitz, T.L.1
Beckwith, J.F.2
-
16
-
-
0036776413
-
Modeling and verifying non-linearities in heterodyne displacement interferometry
-
Cosijns S.J.A.G., Haitjema H., and Schellekens P.H.J. Modeling and verifying non-linearities in heterodyne displacement interferometry. Precis Eng 26 4 (2002) 448-455
-
(2002)
Precis Eng
, vol.26
, Issue.4
, pp. 448-455
-
-
Cosijns, S.J.A.G.1
Haitjema, H.2
Schellekens, P.H.J.3
-
17
-
-
0037093451
-
A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry
-
Peggs G.N., and Yacoot A. A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry. Philos Trans Roy Soc A 360 1794 (2002) 953-968
-
(2002)
Philos Trans Roy Soc A
, vol.360
, Issue.1794
, pp. 953-968
-
-
Peggs, G.N.1
Yacoot, A.2
-
18
-
-
0036460176
-
Periodic nonlinearity resulting from ghost reflections in heterodyne interferometry
-
Wu C.M. Periodic nonlinearity resulting from ghost reflections in heterodyne interferometry. Opt Commun 215 1-3 (2003) 17-23
-
(2003)
Opt Commun
, vol.215
, Issue.1-3
, pp. 17-23
-
-
Wu, C.M.1
-
19
-
-
0042244332
-
An investigation of two unexplored periodic error sources in differential-path interferometry
-
Schmitz T.L., and Beckwith J.E. An investigation of two unexplored periodic error sources in differential-path interferometry. Precis Eng 27 3 (2003) 311-322
-
(2003)
Precis Eng
, vol.27
, Issue.3
, pp. 311-322
-
-
Schmitz, T.L.1
Beckwith, J.E.2
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