The role of periodic interferometer errors in the calibration of capacitance displacement sensors for nanometrology application

Measurement Science and Technology

Volumn 12, Issue 11, 2001, Pages 2002-2008

  Koning R ^a   Dixson, R ^a   Fu, J ^a   Vorburger, T V ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Calibration; Capacitance displacement sensor; Error analysis; Interferometry; Nanometrology

Indexed keywords

CAPACITANCE; ERROR ANALYSIS; INTERFEROMETERS; LIGHT POLARIZATION; OSCILLATIONS; PIEZOELECTRIC TRANSDUCERS; SENSITIVITY ANALYSIS;

DISPLACEMENT SENSORS;

SENSORS;

CALIBRATION;

EID: 0035504635     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/12/11/333     Document Type: Article

References (14)