Vertical, fully-depleted, surrounding gate MOSFETs on sub-0.1μm thick silicon pillars

Annual Device Research Conference Digest

Volumn , Issue , 1996, Pages 108-109

  Auth, Christopher P ^a   Plummer, James D ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; GATES (TRANSISTOR); LITHOGRAPHY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SUBSTRATES;

SELF ALIGNED DRAIN; SILICON PILLARS; SUBTHRESHOLD SLOPES;

MOSFET DEVICES;

EID: 0029717332     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)