Galvanic corrosion of miniaturized polysilicon structures morphological, electrical, and mechanical effects

Electrochemical and Solid-State Letters

Volumn 8, Issue 9, 2005, Pages

  Miller, David C ^a   Gall, Ken ^a   Stoldt, Conrad R ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION; ELECTROCHEMISTRY; FATIGUE OF MATERIALS; FRICTION; GALVANIZING; MORPHOLOGY; POROSITY; STANDARDS; TRIBOLOGY;

GALVANIC CORROSION; NANOSCALE DEVICES; POLYSILICON STRUCTURES;

POLYSILICON;

EID: 25144512019     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1960009     Document Type: Article

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