Investigation of thermophoretic protection with speed-controlled particles at 100, 50, and 25 mTorr

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 3, 2006, Pages 1178-1184

  Kim, Jung Hyeun ^a   Fissan, Heinz ^b   Asbach, Christof ^b   Yook, Se Jin ^c   Pui, David Y H ^c   Orvek, Kevin J ^d  

^a University of Seoul   (South Korea)

^b Institute of Energy and Environmental Technology   (Germany)

^c University of Minnesota   (United States)

^d INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS MOLECULES; THERMOPHORETIC PROTECTION; ULTRAVIOLET LITHOGRAPHY;

CONTAMINATION; DIFFUSION; LITHOGRAPHY; SPEED CONTROL; VACUUM;

THERMOPHORESIS;

EID: 33744813279     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2190660     Document Type: Article

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