Speed-controlled particle injection into a low-pressure system

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 2, 2006, Pages 229-234

  Kim, Jung Hyeun ^a   Fissan, Heinz ^b   Asbach, Christof ^b   Yook, Se Jin ^c   Pui, David Y H ^c  

^a University of Seoul   (South Korea)

^b Institute of Energy and Environmental Technology   (Germany)

^c University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL) MASKS; LOW-PRESSURE SYSTEMS; PARTICLE INJECTION;

CONTAMINATION; LITHOGRAPHY; SPEED CONTROL; THERMOPHORESIS; ULTRAVIOLET DEVICES;

MASKS;

EID: 33644527293     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2165660     Document Type: Article

References (15)

1. S. Hector and P. Mangat, J. Vac. Sci. Technol. B 19, 2612 (2001).
2. L. E. Klebanoff and D. J. Rader, Patent No. 6,153,044 (2000).
3. L. E. Klebanoff and D. J. Rader, Patent No. 6,253,464 B1 (2001).
4. C. Asbach, J. H. Kim, S.-J. Yook, D. Y. H. Pui, and H. Fissan, J. Nanopart. Res. (submitted).
5. D. E. Dedrick, E. W. Beyer, D. J. Rader, L. E. Klebanoff, and A. H. Leung, J. Vac. Sci. Technol. B 23, 307 (2005).
6. J. H. Kim, H. Fissan, C. Asbach, S.-J. Yook, K. J. Orvek, and D. Y. H. Pui, J. Vac. Sci. Technol. B (submitted).
7. C. Asbach, J. H. Kim, S.-J. Yook, D. Y. H. Pui, and H. Fissan, Appl. Phys. Lett. 87, 234111 (2005).
8. J. H. Kim, C. Asbach, S.-J. Yook, D. Y. H. Pui, A. Ramarmoorthy, P.-Y. Yan, K. J. Orvek, and H. Fissan, J. Vac. Sci. Technol. A 23, 1319 (2005).
9. P. M. Gerhart, R. J. Gross, and J. I. Hochstein, Fundamentals of Fluid Mechanics (Addison-Wesley, Reading, 1992), Chap..
10. W. Jitschin, M. Ronzheimer, and S. Khodabakhshi, Vacuum 53, 181 (1999).
11. W. Jitschin, Vacuum 76, 89 (2004).
12. S. Sato, D.-R. Chen, and D. Y. H. Pui, Aerosol Sci. Technol. 36, 145 (2002).
13. W. C. Hinds, Aerosol Technology, 2nd ed. (Wiley, New York, 1999), Chaps..
14. J. H. Kim, G. W. Mulholland, S. R. Kukuck and D. Y. H. Pui, J. Res. Natl. Inst. Stand. Technol. 110, 31 (2005).
15. M. D. Allen and O. G. Raabe, J. Aerosol Sci. 13, 537 (1982).