Analytical modeling of particle stopping distance at low pressure to evaluate protection schemes for extreme ultraviolet lithography masks

Applied Physics Letters

Volumn 87, Issue 23, 2005, Pages 1-3

  Asbach, Christof ^a   Kim, Jung Hyeun ^a   Yook, Se Jin ^a   Pui, David Y H ^a   Fissan, Heinz ^b  

^a UNIVERSITY OF MINNESOTA   (United States)

^b Institute for Energy and Environmental Technology (IUTA)   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COULOMB FORCE; GRAVITATIONAL SETTLING; ULTRAVIOLET LITHOGRAPHY MASK;

ELECTROPHORESIS; GRAVITATIONAL EFFECTS; THERMOPHORESIS; ULTRAVIOLET DETECTORS;

LITHOGRAPHY;

EID: 28444477314     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2140475     Document Type: Article

References (17)

1. R. Tejeda, R. Engelstad, E. Lovell, and K. Blaedel, J. Vac. Sci. Technol. B 20, 2840 (2002).
2. L. Talbot, R. K. Cheng, R. W. Schefer, and D. R. Willis, J. Fluid Mech. 101, 737 (1980).
3. L. Waldmann, Z. Naturforsch. A 14A, 589 (1959).
4. W. Hinds, Aerosol Technology (Wiley, New York, 1999).
5. T. Peterson, K. M. Sannes, F. Stratmann, and H. Fissan, J. Aerosol Sci. 19, 1409 (1988).
6. Y. Ye, D. Y. H. Pui, B. Y. H. Liu, S. Opiolka, S. Blumhorst, and H. Fissan, J. Aerosol Sci. 22, 63 (1991).
7. S. Opiolka, F. Schmidt, and H. Fissan, J. Aerosol Sci. 25, 665 (1994).
8. F. Schmidt, H. Fissan, and K. G. Schmidt, J. Aerosol Sci. 27, 739 (1996).
9. R. Tsai, Y. P. Chang, and T. Y. Lin, J. Aerosol Sci. 29, 811 (1998).
10. S. J. Choi, D. J. Rader, and A. S. Geller, J. Vac. Sci. Technol. A 14, 660 (1996).
11. E. D. Dedrick, E. W. Beyer, D. J. Rader, L. E. Klebanoff, and A. H. Leung, J. Vac. Sci. Technol. B 23, 307 (2005).
12. E. Cunningham, Proc. R. Soc. London, Ser. A 83, 357 (1910).
13. M. Knudsen and S. Weber, Ann. Phys. 36, 981 (1911).
14. J. H. Kim, G. W. Mulholland, S. R. Kukuck, and D. Y. H. Pui, J. Res. Natl. Inst. Stand. Technol. 110, 31 (2005).
15. P. S. Epstein, Phys. Rev. 24, 710 (1924).
16. L. Waldmann and K. H. Schmitt, Aerosol Science, edited by, C. N. Davies, (Academic, New York, 1966).
17. T. J. Krinke, K. Deppert, M. H. Magnusson, F. Schmidt, and H. Fissan, J. Aerosol Sci. 33, 1341 (2002).