Imaging with solid immersion lenses, spatial resolution, and applications

Proceedings of the IEEE

Volumn 88, Issue 9, 2000, Pages 1491-1498

  Wu, Qiang ^a   Ghislain, Luke P ^b   Elings, V B ^b  

^a IBM MICROELECTRONICS   (United States)

^b Digital Instruments   (United States)

Author keywords

Achromatic imaging; Data storage; Diffraction limit; Evanescent imaging; Fluorescent microscopy; Gallium phosphide; High numerical aperture; High resolution imaging; High throughput; Near field imaging; Photolithography

Indexed keywords

EID: 33646926757     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.883320     Document Type: Article

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