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Volumn 106, Issue 7, 2006, Pages 597-602
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Bottom-up sample preparation technique for interfacial characterization of vertically aligned carbon nanofibers
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Author keywords
Carbon nanofiber; Focused ion beam (FIB); Interconnect; Sample preparation; Scanning transmission electron microscopy (STEM)
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Indexed keywords
INTERFACES (MATERIALS);
ION BEAMS;
NANOSTRUCTURED MATERIALS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SURFACE PROPERTIES;
TRANSMISSION ELECTRON MICROSCOPY;
CARBON NANOFIBER;
FOCUSED ION BEAM (FIB);
INTERCONNECT;
NANOSTRUCTURES;
SCANNING TRANSMISSION ELECTRON MICROSCOPY;
CARBON FIBERS;
CARBON FIBER;
NANOTUBE;
ARTICLE;
CHEMICAL STRUCTURE;
ROENTGEN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
VAPORIZATION;
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EID: 33646785413
PISSN: 03043991
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ultramic.2006.03.001 Document Type: Article |
Times cited : (8)
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References (17)
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