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Volumn 106, Issue 7, 2006, Pages 597-602

Bottom-up sample preparation technique for interfacial characterization of vertically aligned carbon nanofibers

Author keywords

Carbon nanofiber; Focused ion beam (FIB); Interconnect; Sample preparation; Scanning transmission electron microscopy (STEM)

Indexed keywords

INTERFACES (MATERIALS); ION BEAMS; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE PROPERTIES; TRANSMISSION ELECTRON MICROSCOPY;

EID: 33646785413     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2006.03.001     Document Type: Article
Times cited : (8)

References (17)
  • 10
    • 33646791052 scopus 로고    scopus 로고
    • Internatinonal Technology Roadmap for Semiconductors, 2003 Edition, 〈http://public.itrs.net/〉.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.