First-principles investigation of the WCHf O2 interface properties

Journal of Applied Physics

Volumn 99, Issue 8, 2006, Pages

  Knizhnik, A A ^a   Safonov, A A ^a   Iskandarova, I M ^a   Bagatur'yants, A A ^a   Potapkin, B V ^a   Fonseca, L R C ^b   Stoker, M W ^c  

^a Kinetic Technologies Ltd   (Russian Federation)

^b UNIVERSITY OF CAMPINAS   (Brazil)

^c FREESCALE SEMICONDUCTOR INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON INTERMEDIATE LAYER; MONOCLINIC HAFNIA; OXYGEN INTERMEDIATE LAYER;

CARBON; CRYSTAL ATOMIC STRUCTURE; ELECTRONIC PROPERTIES; HAFNIUM COMPOUNDS; MONOLAYERS; THERMODYNAMICS;

TUNGSTEN COMPOUNDS;

EID: 33646753781     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2189209     Document Type: Article

References (38)

1. The International Technology Roadmap for Semiconductors. http://public.itrs.org
2. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 87, 484 (2000).
3. C. C. Hobbs, IEEE Trans. Electron Devices 51, 971/978 (2004).
4. Y.-C. Yeo, T.-J. King, and C. Hu, J. Appl. Phys. 92, 7266 (2002).
5. J. Haglung, A. F. Guillermet, G. Grimvall, and M. Korling, Phys. Rev. B 48, 11685 (1993).
6. K. Kobayashi, Surf. Sci. 493, 665 (2001).
7. A. Y. Liu, R. M. Wentzcovitch, and M. L. Cohen, Phys. Rev. B 38, 9483 (1988).
8. S. J. Wang, H. Y. Tsai, and S. C. Sun, Thin Solid Films 394, 180 (2001).
9. Y.-M. Sun, Thin Solid Films 397, 109 (2001).
10. H. Romanus, V. Cimalla, J. A. Schaefer, L. Spieb, G. Ecke, and J. Pezoldt, Thin Solid Films 359, 146 (2000).
11. H. Hogberg, P. Tagtstrom, J. Lu, and U. Jansson, Thin Solid Films 272, 116 (1996).
12. K. L. Hakansson, H. I. P. Johansson, and L. I. Johansson, Phys. Rev. B 49, 2035 (1994).
13. J. Brillo, A. Hammoudeh, H. Kuhlenbeck, N. Panagiotides, S. Schwegmann, H. Over, and H.-J. Freund, J. Electron Spectrosc. Relat. Phenom. 96, 53 (1998).
14. M. Gothelid and E. Janin, J. Phys.: Condens. Matter 11, 773 (1999).
15. D. J. Siegel, L. G. Hector, Jr., and J. B. Adams, Surf. Sci. 498, 321 (2002).
16. L. F. Mattheiss and D. R. Hamann, Phys. Rev. B 30, 1731 (1984).
17. J. Brillo, H. Kuhlenbeck, and H.-J. Freund, Surf. Sci. 409, 199 (1998).
18. D. M. Ceperley and B. J. Alder, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.45.566 45, 566 (1980); J. P. Perdew and A. Zunger, Phys. Rev. B 23, 5048 (1981).
19. D. M. Ceperley and B. J. Alder, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.45.566 45, 566 (1980); J. P. Perdew and A. Zunger, Phys. Rev. B 23, 5048 (1981).
20. J. P. Perdew and Y. Wang, Phys. Rev. B 46, 6671 (1992).
21. P. Hohenberg and W. Kohn, Phys. Rev. 0096-8269 10.1103/PhysRev.136.B864 136, B864 (1964); W. Kohn and L. J. Sham, Phys. Rev. 140, A1133 (1965).
22. P. Hohenberg and W. Kohn, Phys. Rev. 0096-8269 10.1103/PhysRev.136.B864 136, B864 (1964); W. Kohn and L. J. Sham, Phys. Rev. 140, A1133 (1965).
23. G. Kresse and J. Furthmuller, Phys. Rev. B 54, 11169 (1996).
24. G. Kresse and J. Hafner, J. Phys.: Condens. Matter 6, 8245 (1994).
25. J. W. Edwards, R. Speiser, and H. L. Johnston, J. Appl. Phys. 22, 424 (1951).
26. R. C. Weast, CRC Handbook of Chemistry and Physics, 67th ed., (CRC, Boca Raton, 1983).
27. R. Ruh and P. W. R. Corfield, J. Am. Ceram. Soc. 53, 126 (1970).
28. A. S. Foster, F. Lopez Gejo, A. L. Shluger, and R. M. Nieminen, Phys. Rev. B 65, 174117 (2002).
29. I. Batyrev, A. Alavi, and M. W. Finnis, Faraday Discuss. 114, 33 (2000).
30. H. Michaelson, J. Appl. Phys. 48, 4729 (1977).
31. [1]A. A. Demkov, R. Lui, X. Zhang, and H. Loechelt, J. Vac. Sci. Technol. B 18, 2338 (2000).
32. C. G. van de Walle and R. M. Martin, Phys. Rev. B 39, 1871 (1989).
33. Thermodynamic Properties of Individual Substances, edited by, V. P. Glushko, (Nauka, Moscow, 1978).
34. R. Puthenkovilakam and J. P. Chang, Appl. Phys. Lett. 84, 1353 (2004).
35. T. E. Cook, Jr., C. C. Fulton, W. J. Mecouch, R. F. Davis, G. Lucovsky, and R. J. Nemanich, J. Appl. Phys. 94, 7155 (2003).
36. J. Schaeffer (private communication).
37. A. Knizhnik, I. Iskandarova, A. Bagatur'yants, B. Potapkin, and L. R. C. Fonseca, J. Appl. Phys. 97, 64911 (2005).
38. B. Králik, E. K. Chang, and S. G. Louie, Phys. Rev. B 57, 7027 (1998).