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Volumn 88, Issue 19, 2006, Pages

Processing and on-wafer test of ferroelectric film microwave varactors

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; FERROELECTRIC MATERIALS; MICROWAVE DEVICES; PHOTOLITHOGRAPHY; PULSED LASER DEPOSITION; THIN FILMS;

FERROELECTRIC FILMS; FREQUENCY RANGE; MICROWAVE VARIABLE CAPACITORS; PHOTOLITHOGRAPHIC LIFT-OFF TECHNIQUE;

VARACTORS;

EID: 33646710366 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2202748 Document Type: Article

Times cited : (7)

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