AgTa0.5Nb0.5O3 thin film microwave coplanar waveguide tunable capacitors

Integrated Ferroelectrics

Volumn 77, Issue , 2006, Pages 13-20

  Kim, Jang Yong ^a   Grishin, Alexander M ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Coplanar waveguide; Ferroelectric thin films; Microwave on wafer test; Photolithography; Pulsed laser deposition; Scatering parameter measurements; Silver tan talate niobates; Voltage tunable device

Indexed keywords

FERROELECTRIC THIN FILMS; PHOTOLITHOGRAPHY; PULSED LASER DEPOSITION; SCATTERING PARAMETERS; SILICON WAFERS; SILVER COMPOUNDS; SINGLE CRYSTALS; THIN FILMS; VOLTAGE CONTROL; WAVEGUIDES; X RAY DIFFRACTION;

MICROWAVE ON-WAFER TEST; SCATTERING PARAMETER MEASUREMENTS; SILVER TAN-TALATE NIOBATES;

CAPACITORS;

EID: 33645505627     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580500413624     Document Type: Conference Paper

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